|
|
|
We developed SW-1002 slurry for silicon stock polishing based on home-made, high purity colloidal silica, which has the advantages including high dilution rate, easy to be cleaned after polishing,etc.
The product is extensively applied to the integrate circuit substrate.
|
|
|
【Specification】
|
Inspection Items |
Inspection Methods |
Specification |
|
Appearance |
Eye-measurement |
Milky White Liquid |
|
Solid Content（%） |
Gravimetric Method |
40±2 |
|
pH Value(20℃) |
pH Meter |
11.5-12.5 |
|
Particle Size(nm) |
Dynamic Light Scattering |
80±10 |
|
LPC（parts/ml） |
Optical Particle Sizer |
﹤1000000 |
【Package】
Net Weight:25kg/pail.
|
|
